STP Turbomolecular Vacuum Pumps
For a consistent, reliable performance and zero maintenance, you can rely on Edwards STP Maglev Turbomolecular Pumps to deliver every time.
Our first STP Maglev Turbomolecular Pumps were sold in 1983, we now have over 166,000 installations worldwide. 85% are operating on semiconductor process tools, where they demonstrate exceptional levels of performance and reliability.
STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance.
Energy saving technologies have been incorporated into each design phase of the product development to ensure reduced power consumption and operation efficiency, with no compromise on quality or performance.
- Increased Productivity:
Quicker Pump Down to Base Pressure - Compact Size:
Saves Space & Makes for Easy Installation - Low Cost of Ownership:
Low Power & Utilities Consumption - Maintenance Free:
Economical
View the product brochure to find out more.
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Applications
Flat Panel Display
Our extensive range of STP Maglev Turbomolecular Pumps are designed to maximise substrate throughput and ultimate zero humidity process condition, while minimising power, footprint and weight.
LED
Our latest range of STP Maglev Turbomolecular Pumps are the “all-in-one” compact solution with low power for large volume, high-flow applications.
Photovoltaic
Our STP Maglev Turbomolecular Pumps are optimised to meet customer specific applications, with exceptional process gas handling, consistent performance and maximum reliability.
Semiconductor Processing
The fully magnetically-levitated rotor has been designed to reduce the risk of contamination to the chamber and extend service intervals, making the STP Maglev Turbomolecular Pumps the reliable choice for your process tool.
Product Ranges
Advanced High Throughput Series
The new “Advantage” series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra-reliable, high performance H series of products. Their advanced rotor technology and 3D blade design, combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 300 l/s to 4500 l/s, with throughput up to 6 slm and increased H2, N2 and Ar performances.
Fully Integrated Controller & Power Supply
This really is the all-in-one turbo pump solution, offering great features and savings. The fully-integrated controller eliminates the connection cable and rack conventionally required with a non-integrated controller, this helps reduce footprint, saving valuable fab real estate, as well as installation time and cost. In addition, the on-board controller incorporates a small power supply, which compared to existing products, delivers approximately 32 percent reduction in energy consumption at high gas flows. The range operates with throughput speeds from 300 l/s to 4500 l/s meaning this is an option for many processes and applications.
Ultra High Vacuum
The Ultra High Vacuum series of magnetically levitated turbomolecular pumps are the products of choice for many semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all D.C. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range includes pumps with speeds from 300 l/s to 1000 l/s and <10-10 mbar ultimate pressure (CF flange), plus a “C” version for harsh process is also available.
Ultra High Vacuum Low Vibration Series
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum turbomolecular pump, plus a built-in vibration isolator will give ultra-low vibration performance.
STP Controllers
Select the right controller to partner with your STP Maglev Turbo Pump by selecting from of our range of SCU control Units.
SCU-350 Control Unit
The SCU-350 control unit is a EU-RoHS compliant controller for small sized turbo pumps. It is fully compatible with the current control unit models, but has an improved vibration property at low frequency range. It also has lower input voltage, which contributes to a reduction in electric capacity and tool power consumption. The SCU-350 has improved noise immunity and is equipped with universal voltage function for operation with supply voltage from 100-240 VAC without switching.
SCU-800 Control Unit
The SCU800 turbo pump control unit is a fully digital controller, and has perfect compatibility for middle sized pumps. New AVR (Auto vibration reduction) technology achieves a further reduction in vibration levels, and the advanced pre-maintenance call function provides advanced notice of precise maintenance time.
SCU-1600 Control Unit
The fully digital SCU-1600 turbo pump control unit is compatible with STP turbo pumps ranging from 2000 l/s to 4500 l/s. It provides reliability, enhanced communication and pump compatibility with reduced back-up unit requirements and minimised overall cost of ownership.